Clean room

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Clean room

A clean or ultra-clean room is a special room whose equipment is designed to keep the concentration of airborne particles(aerosols) as low as possible.
Such rooms are required in the semiconductor industry, for example. Here, the dust and suspended particles in the normal room air would have a negative impact on the production of integrated circuits. Cleanrooms can be found in optics, laser technology, aerospace technology, biochemistry, medicine, research and in food, pharmaceutical and nanotechnology.
Various standards and guidelines are used to classify cleanrooms. These include ISO 14644-1, ECSS-Q-ST-70-01, VDI 2083, GMP Guideline Annex 1 and US FED STD 209E. The most important classification criteria include the particle size in µm and the particle quantity perm3 (or ft3).